Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037890 | Method for selectively etching with reduced aspect ratio dependence | Adarsh Basavalingappa, Peng Wang, Michael Goss, Prabhakara Gopaladasu, Randolph F. Knarr +2 more | 2018-07-31 |
| 10002773 | Method for selectively etching silicon oxide with respect to an organic mask | Adarsh Basavalingappa, Peng Wang, Prabhakara Gopaladasu, Michael Goss | 2018-06-19 |