Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037890 | Method for selectively etching with reduced aspect ratio dependence | Peng Wang, Bhaskar Nagabhirava, Michael Goss, Prabhakara Gopaladasu, Randolph F. Knarr +2 more | 2018-07-31 |
| 10002773 | Method for selectively etching silicon oxide with respect to an organic mask | Bhaskar Nagabhirava, Peng Wang, Prabhakara Gopaladasu, Michael Goss | 2018-06-19 |