Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9972502 | Systems and methods for performing in-situ deposition of sidewall image transfer spacers | Jae Ho Lee, Changwoo Lee, Phil Friddle, Stefan Schmitz, Michael Goss +1 more | 2018-05-15 |