Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146131 | Composition, method for producing patterned substrate, film and forming method thereof, and compound | Shin-ya Nakafuji, Fumihiro Toyokawa, Gouji Wakamatsu, Katsuhisa MIZOGUCHI, Takashi Okada +3 more | 2018-12-04 |
| 10090163 | Inorganic film-forming composition for multilayer resist processes, and pattern-forming method | Hisashi Nakagawa, Tatsuya Sakai, Shunsuke Kurita, Satoshi Dei, Kazunori Takanashi +1 more | 2018-10-02 |
| 10078265 | Pattern-forming method, resin, and composition | Shun Aoki, Hiromitsu Tanaka, Goji Wakamatsu, Masayoshi Ishikawa, Toru Kimura | 2018-09-18 |
| 9958781 | Method for film formation, and pattern-forming method | Yuushi MATSUMURA, Goji Wakamatsu, Naoya Nosaka, Tsubasa Abe | 2018-05-01 |
| 9891526 | Pattern forming method | Shunsuke Kurita, Toru Kimura, Kazunori Takanashi | 2018-02-13 |