Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146131 | Composition, method for producing patterned substrate, film and forming method thereof, and compound | Shin-ya Nakafuji, Fumihiro Toyokawa, Yoshio Takimoto, Katsuhisa MIZOGUCHI, Takashi Okada +3 more | 2018-12-04 |
| 10082733 | Fluorine-containing polymer, purification method, and radiation-sensitive resin composition | Hiroki Nakagawa, Hiromitsu Nakashima, Kentarou Gotou, Yukio Nishimura, Takeo Shioya | 2018-09-25 |