Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090163 | Inorganic film-forming composition for multilayer resist processes, and pattern-forming method | Hisashi Nakagawa, Tatsuya Sakai, Satoshi Dei, Kazunori Takanashi, Yoshio Takimoto +1 more | 2018-10-02 |
| 9891526 | Pattern forming method | Toru Kimura, Yoshio Takimoto, Kazunori Takanashi | 2018-02-13 |