Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090163 | Inorganic film-forming composition for multilayer resist processes, and pattern-forming method | Hisashi Nakagawa, Tatsuya Sakai, Shunsuke Kurita, Satoshi Dei, Yoshio Takimoto +1 more | 2018-10-02 |
| 10025188 | Resist pattern-forming method | Yusuke Anno, Takashi Mori, Hirokazu Sakakibara, Taiichi Furukawa, Hiromitsu Tanaka +1 more | 2018-07-17 |
| 9891526 | Pattern forming method | Shunsuke Kurita, Toru Kimura, Yoshio Takimoto | 2018-02-13 |