Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Leonid M. Tertitski, Schubert S. Chu, Shay Assaf, Kim Vellore | 2018-05-01 |