Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892982 | Method for controlling exhaust flow in wafer processing module | Kuo-Shu Tseng, Chien-Hua Chen, You-Feng CHEN, Yen-Yu Chen, Yung-Haw Liaw | 2018-02-13 |
| 9868109 | Titanate / titania composite nanoparticle | Yu Hua Cheng | 2018-01-16 |