Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157735 | Pentachlorodisilane | — | 2018-12-18 |
| 10049882 | Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD | Won Woong Chung, Sun Hye HWANG, Youn-Joung Cho, Jung-Sik Choi, Brian D. Rekken +2 more | 2018-08-14 |
| 10030037 | Diaminosilane compounds | Brian D. Rekken | 2018-07-24 |
| 10030038 | Monoaminosilane compounds | Brian D. Rekken | 2018-07-24 |
| 9926203 | Method of making 2,2,4,4-tetrasilylpentasilane | — | 2018-03-27 |
| 9899392 | Silicon precursor, method of forming a layer using the same, and method of fabricating semiconductor device using the same | JunHyun Cho, Michael Telgenhoff, Kyunghye Jung, Younjoung Cho | 2018-02-20 |