Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899392 | Silicon precursor, method of forming a layer using the same, and method of fabricating semiconductor device using the same | JunHyun Cho, Michael Telgenhoff, Xiaobing Zhou, Younjoung Cho | 2018-02-20 |