Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106890 | Compositions and methods using same for deposition of silicon-containing film | Jianheng Li, John Francis Lehmann, Xinjian Lei, Raymond Nicholas Vrtis, Robert Gordon Ridgeway | 2018-10-23 |
| 9967965 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Ali Shajii, Richard A. Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti | 2018-05-08 |
| 9922818 | Alkyl-alkoxysilacyclic compounds | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Jianheng Li, Jennifer Lynn Anne Achtyl, Xinjian Lei | 2018-03-20 |