Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10102938 | Extreme ultraviolet light generating apparatus | Takayuki Yabu, Tamotsu Abe, Kenichi Miyao | 2018-10-16 |
| 9954340 | Excimer laser apparatus and excimer laser system | Takeshi Ohta, Hiroaki TSUSHIMA, Osamu Wakabayashi | 2018-04-24 |