Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090163 | Inorganic film-forming composition for multilayer resist processes, and pattern-forming method | Hisashi Nakagawa, Tatsuya Sakai, Shunsuke Kurita, Kazunori Takanashi, Yoshio Takimoto +1 more | 2018-10-02 |