Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020159 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Munehiro Ogasawara, Hideo Inoue | 2018-07-10 |
| 9934935 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Hideo Inoue, Hayato Kimura, Yasuo Kato, Jun Yashima | 2018-04-03 |