Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157731 | Semiconductor processing apparatus with protective coating including amorphous phase | Jennifer Y. Sun, Kenneth S. Collins | 2018-12-18 |
| 9975320 | Diffusion bonded plasma resisted chemical vapor deposition (CVD) chamber heater | Juan Carlos Rocha-Alvarez, Jianhua Zhou | 2018-05-22 |
| 9896376 | Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agent | Jennifer Y. Sun, Kenneth S. Collins | 2018-02-20 |