Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115593 | Chemical modification of hardmask films for enhanced etching and selective removal | David Knapp, Simon Huang, Jeffrey W. Anthis, David Thompson | 2018-10-30 |
| 9870915 | Chemical modification of hardmask films for enhanced etching and selective removal | David Knapp, Simon Huang, Jeffrey W. Anthis, David Thompson | 2018-01-16 |