Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10060032 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Masaki Ogata, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more | 2018-08-28 |
| 10030306 | PECVD apparatus and process | Nagarajan Rajagopalan, Xinhai Han, Masaki Ogata, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more | 2018-07-24 |
| 9947599 | Method for PECVD overlay improvement | Yoichi Suzuki, Kwangduk Douglas Lee, Takashi Morii, Yuta GOTO | 2018-04-17 |