Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049882 | Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD | Won Woong Chung, Sun Hye HWANG, Youn-Joung Cho, Jung-Sik Choi, Xiaobing Zhou +2 more | 2018-08-14 |
| 9899392 | Silicon precursor, method of forming a layer using the same, and method of fabricating semiconductor device using the same | JunHyun Cho, Xiaobing Zhou, Kyunghye Jung, Younjoung Cho | 2018-02-20 |