Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141188 | Resist having tuned interface hardmask layer for EUV exposure | Ravi K. Bonam, Anuja E. DeSilva, Scott D. Halle | 2018-11-27 |
| 10134592 | Resist having tuned interface hardmask layer for EUV exposure | Ravi K. Bonam, Anuja E. DeSilva, Scott D. Halle | 2018-11-20 |
| 9929012 | Resist having tuned interface hardmask layer for EUV exposure | Ravi K. Bonam, Anuja E. DeSilva, Scott D. Halle | 2018-03-27 |