Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D836572 | Target profile for a physical vapor deposition chamber target | Fuhong Zhang, Xiaodong Wang | 2018-12-25 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Uday Pai, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed, Thanh X. Nguyen +1 more | 2018-05-01 |
| 9960024 | Biasable flux optimizer / collimator for PVD sputter chamber | Fuhong Zhang, Anthony Infante, Zheng Wang | 2018-05-01 |