Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120285 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda | 2018-11-06 |
| 10014190 | Liquid processing apparatus | Yasushi Takiguchi, Koki Yoshimura, Taro Yamamoto, Hideharu Kyouda | 2018-07-03 |
| 9947556 | Substrate cleaning apparatus, substrate cleaning method, and storage medium | Yasushi Takiguchi, Taro Yamamoto, Hideharu Kyouda | 2018-04-17 |