Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905723 | Methods for plasma activation of evaporated precursors in a process chamber | Byung Sung Kwak, Stefan Bangert, Nety M. Krishna | 2018-02-27 |
| 9879341 | Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials | Deepak Jadhav, Ashutosh Agarwal, Ashish Goel, Vijay Parihar, Er-Xuan Ping +1 more | 2018-01-30 |