Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905723 | Methods for plasma activation of evaporated precursors in a process chamber | Kaushal K. Singh, Stefan Bangert, Nety M. Krishna | 2018-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905723 | Methods for plasma activation of evaporated precursors in a process chamber | Kaushal K. Singh, Stefan Bangert, Nety M. Krishna | 2018-02-27 |