Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905723 | Methods for plasma activation of evaporated precursors in a process chamber | Byung Sung Kwak, Kaushal K. Singh, Nety M. Krishna | 2018-02-27 |
| 9899635 | System for depositing one or more layers on a substrate supported by a carrier and method using the same | Uwe SCHÜßLER, Jose Manuel DIEGUEZ-CAMPO, Dieter Haas | 2018-02-20 |