Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899635 | System for depositing one or more layers on a substrate supported by a carrier and method using the same | Stefan Bangert, Uwe SCHÜßLER, Dieter Haas | 2018-02-20 |
| 9873945 | Common deposition platform, processing station, and method of operation thereof | Neil MORRISON, Heike Landgraf, Tobias Stolley, Stefan Hein, Florian RIES +1 more | 2018-01-23 |