Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9926627 | System and methods for processing a substrate | Uwe Hermanns, Neil MORRISON, Volker Hacker | 2018-03-27 |
| 9873945 | Common deposition platform, processing station, and method of operation thereof | Neil MORRISON, Jose Manuel DIEGUEZ-CAMPO, Heike Landgraf, Stefan Hein, Florian RIES +1 more | 2018-01-23 |