Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121682 | Purging of porogen from UV cure chamber | Stephen Yu-Hong Lau, George D. Kamian, Ming Xi | 2018-11-06 |
| 10020197 | Method for reducing porogen accumulation from a UV-cure chamber | Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more | 2018-07-10 |
| 9873946 | Multi-station sequential curing of dielectric films | Jason Dirk Haverkamp, Dennis M. Hausmann, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin +1 more | 2018-01-23 |