Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161034 | Rapid chamber clean using concurrent in-situ and remote plasma sources | Keith Fox, Jonathan Church, Matthew Mudrow, Kevin Gerber | 2018-12-25 |
| 10147597 | Turbulent flow spiral multi-zone precursor vaporizer | Mitchell Lamar, Matthew Mudrow, Mathew Joseph Weissinger, Damodar Rajaram Shanbhag | 2018-12-04 |
| 10020197 | Method for reducing porogen accumulation from a UV-cure chamber | Lisa Gytri, Jeff Gordon, Carmen Balderrama, Joseph Brett Harris, Eugene Smargiassi +3 more | 2018-07-10 |