Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161034 | Rapid chamber clean using concurrent in-situ and remote plasma sources | Jonathan Church, James Lee, Matthew Mudrow, Kevin Gerber | 2018-12-25 |
KF
Keith Fox
Overall (2018): #346,322 of 503,207Top 70%
1
Patents 2018