Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161034 | Rapid chamber clean using concurrent in-situ and remote plasma sources | Keith Fox, Jonathan Church, James Lee, Kevin Gerber | 2018-12-25 |
| 10147597 | Turbulent flow spiral multi-zone precursor vaporizer | James Lee, Mitchell Lamar, Mathew Joseph Weissinger, Damodar Rajaram Shanbhag | 2018-12-04 |