Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121682 | Purging of porogen from UV cure chamber | Eugene Smargiassi, Stephen Yu-Hong Lau, Ming Xi | 2018-11-06 |
| 10020197 | Method for reducing porogen accumulation from a UV-cure chamber | Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more | 2018-07-10 |
| 9890465 | Apparatus and methods for uniformly forming porous semiconductor on a substrate | Karl-Josef Kramer, Mehrdad M. Moslehi, Subramanian Tamilmani, Jay Ashjaee, Takao Yonehara | 2018-02-13 |
| 9869031 | High-productivity porous semiconductor manufacturing equipment | Somnath Nag, Subramanian Tamilmani, Mehrdad M. Moslehi, Karl-Josef Kramer, Takao Yonehara | 2018-01-16 |
| 9870937 | High productivity deposition reactor comprising a gas flow chamber having a tapered gas flow space | Mehrdad M. Moslehi, Karl-Josef Kramer, Jay Ashjaee, David Mordo, Takao Yonehara | 2018-01-16 |