Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096512 | Gapfill film modification for advanced CMP and recess flow | Ludovic Godet, Srinivas D. Nemani, Ellie Yieh | 2018-10-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096512 | Gapfill film modification for advanced CMP and recess flow | Ludovic Godet, Srinivas D. Nemani, Ellie Yieh | 2018-10-09 |