Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109514 | Visual feedback for process control in RTP chambers | Kim Vellore, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2018-10-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109514 | Visual feedback for process control in RTP chambers | Kim Vellore, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski, Norman L. Tam +2 more | 2018-10-23 |