Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865489 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Robert T. Hirahara | 2018-01-09 |
DD
Dan DEYO
Overall (2018): #447,332 of 503,207Top 90%
1
Patents 2018