Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002782 | ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough | Keith Gaff, Alexander Matyushkin, Zhigang Chen, Keith Comendant | 2018-06-19 |
| 9922857 | Electrostatically clamped edge ring | Keith Gaff, Feng Wang | 2018-03-20 |