Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10030964 | Systems and methods for performing phase shift interferometry while a wafer is vibrating | Andrey Melnikov, John F. Valley, Markus Jan Peter Siegert | 2018-07-24 |
| 10032659 | Methods and systems for preventing unsafe operations | Mike Wolfram | 2018-07-24 |
| 10007255 | Systems and methods for controlling temperatures in an epitaxial reactor | Arash Abedijaberi, Gang Wang, Ellen Torack | 2018-06-26 |