Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10030964 | Systems and methods for performing phase shift interferometry while a wafer is vibrating | Benno Orschel, John F. Valley, Markus Jan Peter Siegert | 2018-07-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10030964 | Systems and methods for performing phase shift interferometry while a wafer is vibrating | Benno Orschel, John F. Valley, Markus Jan Peter Siegert | 2018-07-24 |