Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062158 | Wafer nanotopography metrology for lithography based on thickness maps | — | 2018-08-28 |
| 10030964 | Systems and methods for performing phase shift interferometry while a wafer is vibrating | Benno Orschel, Andrey Melnikov, Markus Jan Peter Siegert | 2018-07-24 |