Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145011 | Substrate processing systems having multiple gas flow controllers | John A. Pitney, Shawn George Thomas | 2018-12-04 |
| 10007255 | Systems and methods for controlling temperatures in an epitaxial reactor | Benno Orschel, Gang Wang, Ellen Torack | 2018-06-26 |