Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145011 | Substrate processing systems having multiple gas flow controllers | Arash Abedijaberi, John A. Pitney | 2018-12-04 |
| 10079170 | High resistivity SOI wafers and a method of manufacturing thereof | Igor Peidous, Srikanth Kommu, Gang Wang | 2018-09-18 |
| 10072892 | Semiconductor wafer support ring for heat treatment | Qingmin Liu, William L. Luter | 2018-09-11 |