Showing 1–10 of 10 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Koji Yoshii | Tokyo Electron Limited | 3 |
| 2 | Fumiaki Hayase | Tokyo Electron Limited | 2 |
| 2 | Manabu Honma | Tokyo Electron Limited | 2 |
| #4 | Wenling Wang | Tokyo Electron Limited | 1 |
| #4 | Mitsuru Obara | Konica Minolta | 1 |
| #4 | Koichi Shimada | Canon | 1 |
| #4 | Rintaro Takao | Tokyo Electron Limited | 1 |
| #4 | Hiroko Sasaki | Tokyo Electron Limited | 1 |
| #4 | Katsuaki Sugawara | Tokyo Electron Limited | 1 |
| #4 | Koyu Hasegawa | Tokyo Electron Limited | 1 |