Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053776 | Method of detoxifying exhaust pipe and film forming apparatus | Yu Wamura, Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki, Hiroko Sasaki | 2018-08-21 |
| 9929008 | Substrate processing method and substrate processing apparatus | Yu Wamura, Masahiko Kaminishi, Yu Sasaki, Kosuke Takahashi | 2018-03-27 |