Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002417 | Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus | Kiichi Takahashi, Takeshi Kobayashi, Yuji Takabatake, Naohide Ito | 2018-06-19 |