Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9920424 | Method of cleaning thin film forming apparatus, thin film forming method, thin film forming apparatus and non-transitory recording medium | Ryota GOTO | 2018-03-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9920424 | Method of cleaning thin film forming apparatus, thin film forming method, thin film forming apparatus and non-transitory recording medium | Ryota GOTO | 2018-03-20 |