Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10078271 | Optical component | Matthias Orth, Roger Marc Bostock, Jian Deng, Sebastian Lani, Benedikt Knauf +1 more | 2018-09-18 |
| 9946161 | Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method | Ingo Saenger, Ralf Scharnweber, Olaf Dittmann, Toralf Gruner, Gundula Weiss +5 more | 2018-04-17 |