Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9904177 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Ivo Adam Johannes Thomas, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Thibault Simon Mathieu Laurent, Gregory Martin Mason Corcoran +2 more | 2018-02-27 |
| 9897928 | Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method | Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more | 2018-02-20 |