Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103046 | Buffer chamber wafer heating mechanism and supporting robot | William T. Weaver, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2018-10-16 |
| 9933314 | Semiconductor workpiece temperature measurement system | Klaus Petry, Ala Moradian, Morgan Evans | 2018-04-03 |
| 9899242 | Device and method for substrate heating during transport | Morgan Evans, Ala Moradian, Robert Brent Vopat, David Blahnik, William T. Weaver | 2018-02-20 |