Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103046 | Buffer chamber wafer heating mechanism and supporting robot | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon | 2018-10-16 |
| 9995631 | System and method to monitor semiconductor workpiece temperature using thermal imaging | Gary Wyka, Aaron P. Webb | 2018-06-12 |
| 9862101 | Self-damping end effector | Jack J. LoPiccolo | 2018-01-09 |