Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748113 | Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system | George D. Papasouliotis, Daewon Kwon | 2017-08-29 |
| 9653340 | Heated wafer carrier profiling | Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Alexander I. Gurary +2 more | 2017-05-16 |
| 9593434 | Alkyl push flow for vertical flow rotating disk reactors | Michael Murphy, Richard A. Hoffman, Jonathan Cruel, Lev Kadinski, Jeffrey C. Ramer | 2017-03-14 |